Method for driving a nonvolatile semiconductor memory device

ABSTRACT

A method for driving a nonvolatile semiconductor memory device is provided. The nonvolatile semiconductor memory device has source/drain diffusion layers spaced from each other in a surface portion of a semiconductor substrate, a laminated insulating film formed on a channel between the source/drain diffusion layers and including a charge storage layer, and a gate electrode formed on the laminated insulating film, the nonvolatile semiconductor memory device changing its data memory state by injection of charges into the charge storage layer. The method includes, before injecting charges to change the data memory state into the charge storage layer: injecting charges having a polarity identical to that of the charges to be injected; and further injecting charges having a polarity opposite to that of the injected charges.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a division of and claims the benefit of priorityunder 35 U.S.C. §120 from U.S. Ser. No. 13/094,534 filed Apr. 26, 2011,which is a divisional of U.S. Ser. No. 12/053,108 filed Mar. 21, 2008(now U.S. Pat. No. 7,961,524 issued Jun. 14, 2011), and claims thebenefit of priority under 35 U.S.C. §119 from Japanese PatentApplication No. 2007-252137 filed Sep. 27, 2007; the entire contents ofeach of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a method for driving a nonvolatilesemiconductor memory device based on transistor type memory cells havingan insulating film charge storage layer.

2. Background Art

With the recent progress of downscaling, a NAND flash memory having afloating gate involves the problem of noticeable interference betweenadjacent memory cells due to the thickness of the floating gate itselfas well as the difficulty in burying an insulating film between thecells.

To avoid such problems specific to floating gate flash memories, aso-called MONOS flash memory is proposed (e.g., JP-A 2005-011490(Kokai)and US Patent Application Publication No. 2005/0006698). “MONOS” is anabbreviation for the “metal-oxide (oxide film)-nitride (silicon nitridefilm)-oxide (oxide film)-silicon” structure. It is characterized in thatthe data memory state is changed by causing discrete traps existing inthe charge storage layer such as a silicon nitride film to capturecharges. Like the oxide film, the charge storage layer is also aninsulating film and allows thin film formation. Hence the above problemsoccurring in floating gate flash memories can be resolved. The number ofdiscrete traps and the depth of the traps in the charge storage layeraffect the capturing efficiency and charge retention capability at thetime of charge injection. Hence, besides the silicon nitride film,application of a metal oxide film and the process condition therefor areunder development.

In a MONOS flash memory, charges are captured by discrete traps. Hencethe data memory state depends on the position of the discrete traps andthe position of the captured charges. Likewise, the charge capturingefficiency depends on the charge distribution in the charge storagelayer before capturing the charges. Furthermore, in the charge retentionstate, the captured charges may be redistributed in the charge storagelayer to change the data memory state.

However, the operation for changing the data memory state and readingthe data used in the MONOS flash memory is similar to the operation inconventional floating gate flash memories. There has been noinvestigation on the method specific to the MONOS flash memory forelectrically controlling the charge distribution in the charge storagelayer. More specifically, there has been no investigation on how thecharge capturing efficiency and the data memory state are affected bycontrolling the charge distribution in the charge storage layer, and themethod for electrically controlling the charge distribution has yet tobe established.

SUMMARY OF THE INVENTION

According to an aspect of the invention, there is provided a method fordriving a nonvolatile semiconductor memory device having source/draindiffusion layers spaced from each other in a surface portion of asemiconductor substrate, a laminated insulating film formed on a channelbetween the source/drain diffusion layers and including a charge storagelayer, and a gate electrode formed on the laminated insulating film, thenonvolatile semiconductor memory device changing its data memory stateby injection of charges into the charge storage layer, the methodincluding, before injecting charges to change the data memory state intothe charge storage layer: injecting charges having a polarity identicalto that of the charges to be injected; and further injecting chargeshaving a polarity opposite to that of the injected charges.

According to another aspect of the invention, there is provided a methodfor driving a nonvolatile semiconductor memory device havingsource/drain diffusion layers spaced from each other in a surfaceportion of a semiconductor substrate, a laminated insulating film formedon a channel between the source/drain diffusion layers and including acharge storage layer, and a gate electrode formed on the laminatedinsulating film, the nonvolatile semiconductor memory device changingits data memory state by injection of electrons into the charge storagelayer, the method including, before injecting electrons to change thedata memory state into the charge storage layer: providing a firstpotential difference between the semiconductor substrate and the gateelectrode so that the gate electrode has a higher potential than thesemiconductor substrate; and subsequently providing a second potentialdifference between the semiconductor substrate and the gate electrode sothat the gate electrode has a lower potential than the semiconductorsubstrate.

According to another aspect of the invention, there is provided a methodfor driving a nonvolatile semiconductor memory device havingsource/drain diffusion layers spaced from each other in a surfaceportion of a semiconductor substrate, a laminated insulating film formedon a channel between the source/drain diffusion layers and including acharge storage layer, and a gate electrode formed on the laminatedinsulating film, the nonvolatile semiconductor memory device changingits data memory state by injection of holes into the charge storagelayer, the method including, before injecting holes as the charges tochange the data memory state into the charge storage layer: providing athird potential difference between the semiconductor substrate and thegate electrode so that the semiconductor substrate has a higherpotential than the gate electrode; and subsequently providing a fourthpotential difference between the semiconductor substrate and the gateelectrode so that the semiconductor substrate has a lower potential thanthe gate electrode.

According to another aspect of the invention, there is provided a methodfor driving a nonvolatile semiconductor memory device havingsource/drain diffusion layers spaced from each other in a surfaceportion of a semiconductor substrate, a laminated insulating film formedon a channel between the source/drain diffusion layers and including acharge storage layer, and a gate electrode formed on the laminatedinsulating film, the nonvolatile semiconductor memory device changingits data memory state by injection of charges into the charge storagelayer, the method including: after injecting the charges into the chargestorage layer, retaining the charges by providing a potential differencehaving a polarity corresponding to the injected charges between thesemiconductor substrate and the gate electrode.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are schematic views of charge distribution in a MONOSmemory cell;

FIG. 2 is a cross-sectional view illustrating the structure of a MONOSmemory cell to which this embodiment is applied;

FIGS. 3A and 3B are process diagrams of the sequence of the method fordriving a nonvolatile semiconductor device;

FIGS. 4A to 4C are schematic views of the changes of charge distributionin the memory cell;

FIG. 5 is a graph showing the temporal variation of the thresholdaccording to the embodiment;

FIG. 6 is a graph showing the results characterizing the programoperation characteristics;

FIGS. 7A to 7C are schematic views of the changes of charge distributionin the memory cell;

FIG. 8 is a cross-sectional view illustrating the cross-section of aNAND string in the column direction;

FIGS. 9A and 9B are schematic views for illustrating the thresholddistribution and the definition of the threshold level;

FIGS. 10A to 10C are time charts of the method for operating a NANDstring;

FIG. 11 is a process diagram showing the sequence of a method fordriving a nonvolatile semiconductor memory device;

FIG. 12 is a graph schematically showing the retention characteristicsof the threshold voltage;

FIG. 13 is a graph showing the results characterizing the retentioncharacteristics;

FIG. 14 is a process diagram showing the sequence of a method fordriving a nonvolatile semiconductor memory device according to a secondembodiment of the invention; and

FIG. 15 is a schematic view illustrating a schematic configuration of anonvolatile semiconductor memory device.

DETAILED DESCRIPTION OF THE INVENTION

The invention is applicable to nonvolatile semiconductor memory deviceshaving memory cells composed of a laminated insulating film including acharge storage layer. Among them, the invention is suitable to the MONOSflash memory in that the MONOS flash memory allows thin film formation,that thin film formation can reduce interference between adjacent cells,and that the captured charges are resistant to releasing becauseinsulating films (e.g. silicon oxide films) are formed above and belowthe charge storage layer. It is noted that the invention is alsoapplicable to other memory cells composed of a laminated insulating filmincluding a charge storage layer having discrete traps. For example, theinvention is also widely applicable to memory cells having MNOS(metal-nitride-oxide-silicon), MONSNOS(metal-oxide-nitride-silicon-nitride-oxide-silicon) and otherstructures.

In the following, the invention is described in detail by taking anN-channel MONOS memory cell as an example. It is noted that theinvention is not limited to the N-channel type, but is also applicableto the P-channel type. The latter case can be addressed by reversing thepolarity of impurities in the source/drain or the semiconductorsubstrate and exchanging the voltages applied to the semiconductorsubstrate and the gate electrode.

Embodiments of the invention will now be described with reference to thedrawings.

Embodiments of the invention related to a nonvolatile memory and amethod for driving the same are described herein by taking an N-channelMONOS memory cell as an example.

FIGS. 1A and 1B show schematic views of charge distribution in a MONOSmemory cell formed by application of a method for driving a nonvolatilememory according to a first embodiment of the invention.

FIG. 2 is a cross-sectional view illustrating the structure of a MONOSmemory cell to which this embodiment is applied.

The MONOS memory cell shown in FIGS. 1 and 2 is formed on asemiconductor substrate 1 doped with P-type impurities. The term“semiconductor substrate” used herein includes a P-type well, a P-typesemiconductor layer (e.g. SOI (silicon on insulator) layer), and aP-type polysilicon layer.

As shown in FIGS. 1A and 1B, a laminated insulating film 3 including acharge storage layer 3B is deposited on the semiconductor substrate 1. Agate electrode 4 is formed on the laminated insulating film 3. Thecharge storage layer 3B includes discrete traps and serves to captureinjected charges. The discrete traps are spatially distributed in thecharge storage layer, near the interface with the insulating film 3A onthe semiconductor substrate 1 side, or near the interface with theinsulating film 3C on the gate electrode 4 side. The charge storagelayer is typically made of a silicon nitride film, but it can bereplaced by a metal oxide film having a high density of discrete traps.Alternatively, the charge storage layer can also be made by laminating aplurality of materials having discrete traps. Likewise, the chargestorage layer can be configured so as to include an insulating layerand/or a conductor layer having no discrete traps.

The charge storage layer can be made of various materials, includingsilicon oxynitride (SiON), aluminum oxide (Al₂O₃), aluminum oxynitride(AlON), hafnia (HfO₂), hafnium aluminate (HfAlO₃), hafnia nitride(HfON), hafnium nitride aluminate (HfAlON), hafnium silicate (HfSiO),hafnium nitride silicate (HfSiON), lanthanum oxide (La₂O₃), andlanthanum aluminate (LaAlO₃). Furthermore, the charge storage layer canbe based on various laminated structures such as NA, NH, NL, NAN, NHN,NLN, NHA, NAL, and AHL (all in no particular order), where “N”represents silicon nitride, “A” represents aluminum oxide, “H”represents a material containing hafnium as a primary element, and “L”represents a material containing lanthanum as a primary element.

The insulating film 3A and the insulating film 3C electrically insulatethe charge storage layer 3B from the semiconductor substrate 1 or thegate electrode 4 and serve to confine charges in the charge storagelayer 3B during charge retention. The effect of confining chargesincreases as the potential barrier of the insulating films 3A and 3Cbecomes higher with respect to the charge storage layer 3B. Theinsulating films 3A and 3C are typically made of silicon oxide, but itcan be replaced by other materials if it has a potential barrier withrespect to the charge storage layer 3B. The insulating films 3A and 3Ccan be made of various materials, including silicon oxynitride (SiON),aluminum oxide (Al₂O₃), aluminum oxynitride (AlON), hafnia (HfO₂),hafnium aluminate (HfAlO₃), hafnia nitride (HfON), hafnium nitridealuminate (HfAlON), hafnium silicate (HfSiO), hafnium nitride silicate(HfSiON), lanthanum oxide (La₂O₃), and lanthanum aluminate (LaAlO₃).

The gate electrode 4 is formed on the laminated insulating film. Asource/drain 2 is formed by ion implantation of N-type impurities intothe semiconductor substrate 1 using the gate electrode 4 as a mask.

FIG. 1A shows the charge distribution formed before a program operationin this embodiment, and FIG. 1B shows the charge distribution formedbefore an erase operation in this embodiment.

When the charge distribution shown in FIG. 1A is formed, electroninjection intended for retention is preceded by a program operation (A)and a subsequent erase operation (B). The sequence of steps includingthe program operation (A) and the erase operation (B) is hereinafterreferred to as “preset 1”. Here, by the first program operation (A), thediscrete traps in the charge storage layer 3B are filled with electrons.By the next erase operation (B), holes are captured by some of thediscrete traps in the charge storage layer 3B filled with electrons.Specifically, by the erase operation (B), holes are injected from thesemiconductor substrate 1. At this time, the holes are captured near theinterface of the charge storage layer 3B facing the semiconductorsubstrate 1. By the above program operation (A) and the subsequent eraseoperation (B), the charge distribution shown in FIG. 1A is formed in thecharge storage layer 3B. That is, the charge distribution in the chargestorage layer 3B is such that electrons are captured near the interfacewith the gate electrode 4 and holes are captured near the interface withthe semiconductor substrate 1. This allows electrons to easily enter thesubstrate side of the charge storage layer 3B when a voltage for theprogram operation is applied to the gate electrode 4. That is, theefficiency of the program operation can be improved. The process ischaracterized in that the discrete traps in the charge storage layer 3Bare not completely filled with holes by the erase operation (B).

Electron flows from a portion having a lower potential to a portionhaving a higher potential. Hole flows from a portion having a higherpotential to a portion having a lower potential.

FIGS. 3A and 3B show process diagrams of the sequence of the method fordriving a nonvolatile semiconductor device according to the firstembodiment of the invention.

FIG. 3A shows the process of the driving method in the programoperation. A potential difference is provided between the semiconductorsubstrate 1 and the gate electrode 4 so that the gate electrode 4 has arelatively higher potential than the semiconductor substrate 1 (stepS101). Then a potential difference is provided between the semiconductorsubstrate 1 and the gate electrode 4 so that the semiconductor substrate1 has a relatively higher potential than the gate electrode 4 (stepS102). Subsequently, the program operation (step S103) is performed.

Step S101 corresponds to the program operation (A), and step S102corresponds to the erase operation (B). These correspond to the preset 1described above.

FIG. 3B shows the process of the driving method in the erase operation.A potential difference is provided between the semiconductor substrate 1and the gate electrode 4 so that the semiconductor substrate 1 has arelatively higher potential than the gate electrode 4 (step S106). Thena potential difference is provided between the semiconductor substrate 1and the gate electrode 4 so that the gate electrode 4 has a relativelyhigher potential than the semiconductor substrate 1 (step S107).Subsequently, the erase operation (step S108) is performed.

Step S106 corresponds to the erase operation (C), and step S107corresponds to the program operation (D). These correspond to the preset2 described below.

FIGS. 4A through 4C show schematic views of the changes of chargedistribution in the memory cell in each step shown in FIG. 3A.

In step S101, as shown in FIG. 4A, the potential of the gate electrode 4is made higher than that of the semiconductor substrate 1 to injectelectrons into the charge storage layer 3B from the semiconductorsubstrate 1 side. In a memory cell array, electrons can be injected intoall the memory cells collectively. In step S102, as shown in FIG. 4B,the potential of the semiconductor substrate 1 is made higher than thatof the gate electrode 4 to inject holes into the charge storage layer 3Bfrom the semiconductor substrate 1 side. This step can be alsocollectively performed on all the memory cells in the memory cell array.In step S103, as shown in FIG. 4C, by injecting electrons into thecharge storage layer 3B, the program operation is performed on thememory cells with holes existing near the interface of the chargestorage layer 3B facing the semiconductor substrate 1.

The voltage and application time used for the program operation (A) andthe erase operation (B) depend on the dimension of the memory cell. Thevoltage and application time used vary with the generations of memorycells, and hence are arbitrary. However, in setting the voltage used forthe program operation (A) and the erase operation (B), electrical damageto the insulating film 3A needs to be taken into consideration.Preferably, electric field applied to the insulating film 3A is 20 MV/cmor less. More preferably, for rapid operation at low voltage, electricfield applied to the insulating film 3A is 15 MV/cm or less, and theapplication time is 10 seconds or less.

A description is given of the effect of electron injection on thethreshold at the time of formation of the above charge distribution. LetV_(FB) be the flat band voltage of the memory cell in the above chargedistribution. When a gate voltage V_(G) is applied to the gate electrode4, the following electric field is applied to the insulating film 3A:

$\begin{matrix}{E = \frac{V_{G} - V_{FB} - \phi_{S}}{T}} & (1)\end{matrix}$

where φ_(s) is the surface potential of the semiconductor substrate 1,and T is the equivalent oxide thickness (hereinafter abbreviated as EOT)of the overall memory stack. Let J(E) be the electron current injectedfrom the semiconductor substrate by the electric field of equation (1).Then the amount of charge injected in an infinitesimal time Δt isJ(E)Δt.

In the state of charge distribution of FIG. 1A, if electrons areinjected from the semiconductor substrate 1, the discrete traps near theinterface of the charge storage layer 3B facing the gate electrode 4capture no more electrons because they have already been filled withelectrons. In contrast, the neighborhood of the interface of the chargestorage layer 3B facing the semiconductor substrate 1 is filled withholes, and hence can capture electrons. If the amount of charge J(E)Δtinjected by application of the above gate voltage V_(G) to the gateelectrode 4 is captured by the neighborhood of the interface of thecharge storage layer 3B facing the semiconductor substrate 1, thethreshold varies by the following amount:

$\begin{matrix}{{\Delta \; V_{TH}} = {\frac{1}{ɛ_{0}}\left( {\frac{x_{B}}{ɛ_{B}} + \frac{x_{C}}{ɛ_{C}}} \right){J(E)}\Delta \; t}} & (2)\end{matrix}$

where q is the elementary charge, ∈₀ is the dielectric constant of thevacuum, x_(B) and ∈_(B) are the thickness and relative dielectricconstant of the charge storage layer 3B, respectively, and x_(c) and∈_(c) are the thickness and relative dielectric constant of theinsulating film 3C, respectively. The threshold variation varies withprogram time in accordance with equation (2).

FIG. 5 is a graph schematically showing the temporal variation of thethreshold according to the first embodiment.

The threshold variation in accordance with equation (2) is representedby the program curve 1 of FIG. 5.

For comparison purposes, reference is made to the charge distribution ofFIG. 1B. In FIG. 1B, in the charge storage layer 3B, the discrete trapsnear the interface with the semiconductor substrate 1 are filled withelectrons, and the discrete traps near the interface with the gateelectrode 4 are filled with holes. Such a charge distribution is formedby an erase operation (C) and a subsequent program operation (D). Thesequence of steps including the erase operation (C) and the programoperation (D) is hereinafter referred to as “preset 2”.

Let V_(FB) be the flat band voltage of the memory cell in the abovecharge distribution. Then the amount of charge injected by applicationof the gate voltage V_(G) to the gate electrode 4 is also J(E)Δt. Theinjected electrons are located near the interface of the charge storagelayer 3B facing the gate electrode 4. The threshold variation resultingfrom the electron injection is given by, at time t:

$\begin{matrix}{{\Delta \; V_{TH}} = {\frac{1}{ɛ_{0}}\left( \frac{x_{C}}{ɛ_{C}} \right){J(E)}\Delta \; t}} & (3)\end{matrix}$

The threshold variation in accordance with equation (3) is representedby the program curve 2 of FIG. 5. On comparison between equations (2)and (3), equation (2) is higher by (q/∈₀)(x_(B)/∈_(B))J(E)Δt. Equations(2) and (3) reflect two extreme characteristics of the chargedistribution. Hence, depending on the voltage value and application timeof the voltage used in the preset 1 and the preset 2, the preset 1 doesnot always have a larger threshold variation than the preset 2 by(q/∈₀)J(E)Δt(x_(B)/∈_(B)). However, the program speed after theexecution of the preset 1 is always higher than the program speed afterthe execution of the preset 2.

By the erase operation (B), holes are injected into the interface of thecharge storage layer 3B facing the semiconductor substrate 1. Thisfacilitates entrance of electrons at the program time. The thresholdvariation is affected by the distance from the electrode. Hence how thethreshold varies is affected by the charge variation at the interfacewith the semiconductor substrate 1, which is located far from the gateelectrode 4. That is, in the injection of electrons into the chargestorage layer 3B in the program operation, the charge distribution ofFIG. 1A has an effect of increasing the program speed by the amountcorresponding to the thickness of the charge storage layer 3B ascompared with the charge distribution of FIG. 1B.

FIG. 6 is a graph characterizing the program operation characteristics.

The increase of flat band voltage is plotted on the vertical axis versusthe program time. For purposes of comparison between the effects of thepreset 1 and the preset 2, the preset 1 and the preset 2 were applied toa MONOS memory cell in which the insulating film 3A is a silicon oxidefilm having a thickness of 4 nm, the charge storage layer 3B is asilicon nitride film having a thickness of 5 nm, and the insulating film3C is made of alumina having a thickness of 15 nm (the memory cellhaving this thickness configuration being hereinafter referred to asmemory cell 1). FIG. 6 shows the characterization of the programoperation in this setup. The result under the preset 1 is represented bythe mark Δ, and result under the preset 2 is represented by the mark ⋄.Here, under the preset 1, the voltage value and application time of thevoltage for the program operation (A) were 16 V and 5 seconds,respectively, and the voltage value and application time of the voltagefor the erase operation (B) were 16 V and 26 milliseconds, respectively.It is noted that FIG. 6 shows the relative potential of the gateelectrode 4 with respect to the semiconductor substrate 1. Under thepreset 2, the voltage value and application time of the voltage for theerase operation (C) were 18 V and 8 seconds, respectively, and thevoltage value and application time of the voltage for the programoperation (D) were 14 V and 10 microseconds, respectively. As seen fromFIG. 6, a higher flat band voltage is attained for the same program timeunder the preset 1 than under the preset 2. That is, it turns out thatthe program speed under the preset 1 is higher than the program speedunder the preset 2.

It is easily understood that the charge polarity of the chargedistribution for enhancing the erase speed is opposite to that of thecharge distribution for enhancing the program speed. That is, as shownin FIG. 1B, in the charge storage layer 3B of the former chargedistribution, the discrete traps near the interface with thesemiconductor substrate 1 are filled with electrons, and the discretetraps near the interface with the gate electrode 4 are filled withholes. Such a charge distribution is formed by performing the preset 2before the injection of holes for threshold variation. The amount ofthreshold variation after the execution of the preset 2 surpasses theamount of threshold variation after the execution of the preset 1 by(q/∈₀)J(E)Δt(x_(B)/∈_(B)).

It is noted that the voltage pulse used for the preset 1 or the preset 2may be a combination of a plurality of voltage pulses. The combinationneeds to satisfy the following requirements: all the applied voltagesneed to have the same polarity, and the threshold needs to reach anintended threshold after application of the pulses.

FIGS. 7A through 7C show schematic views of charge distribution in thememory cell in each step shown in FIG. 3B.

In step S106, as shown in FIG. 7A, the potential of the semiconductorsubstrate 1 is made higher than that of the gate electrode 4 to injectholes into the charge storage layer 3B from the semiconductor substrate1 side. In a memory cell array, holes can be injected into all thememory cells collectively. In step S107, as shown in FIG. 7B, thepotential of the gate electrode 4 is made higher than that of thesemiconductor substrate 1 to inject electrons into the charge storagelayer 3B from the semiconductor substrate 1 side. This can be alsocollectively performed on all the memory cells in the memory cell array.In step S108, as shown in FIG. 7C, by injecting holes, the eraseoperation is performed on the memory cells with electrons existing nearthe interface of the charge storage layer 3B facing the semiconductorsubstrate 1.

The collective program and the collective erase operation describedabove do not need to be performed each time immediately before theprogram or erase operation, but only need to be performed at power-on,for example. Subsequently, the individual program or erase operation maybe performed.

FIG. 8 is a cross-sectional view of a NAND string in the columndirection. A plurality of MONOS memory cells (M1-Mn) are arranged on thesemiconductor substrate 1. The gate electrode of each memory cell is inelectrical contact with the adjacent NAND string and referred to as wordline WL1-WLn. A source/drain region 2 is formed in the surface of thesemiconductor substrate 1 below the portion between the word lines.

A first and second select transistor S1, S2 are made of a normal MOSFET.The gate electrodes of the select transistors S1, S2 constitute a firstselect gate SG1 and a second select gate SG2, respectively.

An interlayer insulating film 5 (e.g. silicon dioxide) is thicklydeposited on the MONOS memory cells and the select transistors.

A bit line BL2 is connected through a bit contact BC2 to thesource/drain region 2 adjacent to the select transistor S2. Likewise, abit line BL1 is connected through a bit contact BC1 to the source/drainregion 2 adjacent to the select transistor S1. The bit contact BC1 andthe bit line BL1 are not shown.

In the MONOS memory cell of this embodiment, electron injection forvarying the threshold is preceded by a program operation and asubsequent erase operation, thereby enhancing the program speed. Inparticular, in the case of a P-type semiconductor substrate 1, aplurality of NAND strings are connected to each other through word linesWL1-WLn. Hence the erase operation is performed on the plurality ofmemory cells by applying a positive erase voltage to the semiconductorsubstrate with the word lines being held at 0 V. Thus it is suitable toapply this embodiment collectively to a plurality of NAND stringsconnected through word lines before the program operation intended forretention. It is noted that in a NAND memory, a program-verify operation(T. Tanaka, Y. Tanaka, H. Nakamura, H. Oodaira, S. Aritome, R. S hirota,and F. Masuoka, “A Quick Intelligent Programming Architecture 3V-OnlyNAND-EEPROMs”, Symp.VLSI Circuit Dig. Tech. Papers, pp. 20-21, June(1992)) is typically used for controlling the threshold distributionresulting from variations in the memory cells. The present embodiment issuitably used immediately before the program-verify operation.

FIGS. 9A and 9B show schematic views for illustrating the thresholddistribution and the definition of the threshold level of the NANDmemory.

FIG. 9A shows a threshold distribution of a binary memory cell. Thisembodiment is suitably used before the program operation from the “1”level to the “0” level. FIG. 9B shows a threshold distribution of aquaternary memory cell. There are four levels of “11”, “10”, “00”, and“01”, and this embodiment can be used before the program operationbetween any pair of levels. However, under the condition that the eraseoperation is collectively performed, this embodiment is most suitablyused before the program operation from the “11” level to the “10” level.

In another aspect of this embodiment, hole injection for varying thethreshold is preceded by an erase operation and a subsequent programoperation, thereby enhancing the erase speed. As described above, in thecase of using a NAND memory cell, collective use of this embodiment isnot efficient because the erase operation becomes redundant. Hence thisembodiment is suitably used in another memory cell having an oppositepolarity. That is, it is desirable to reverse the polarity of impuritiesin the source/drain or the semiconductor substrate and to exchange thevoltages applied to the semiconductor substrate and the gate electrode.

Next, a method for operating a NAND string is described. As shown inFIG. 8, in a NAND memory, a NAND string is connected through word linesWL1-WLn to the adjacent NAND string. Hence it is suitable to apply thisembodiment collectively to a plurality of NAND strings.

FIGS. 10A through 10C illustrate time charts of the method for operatinga NAND string.

Specifically, FIG. 10A shows a time chart of collective initialization.The preset 1 is performed in accordance with this time chart. First, aprogram-verify operation is completed during time T1. Then the programoperation (A) is performed during the time interval T2-T3. In theprogram operation (A), with the potential of the bit line BL2 held at 0V, a voltage of approximately 5 V is applied to the select gate SG2 toturn the select transistor S2 into the conducting state. Furthermore, aprogram voltage V_(PGM) used for the program operation is applied to theword lines WL1-WLn. Next, the erase operation (B) is performed duringthe time interval T3-T4. In the erase operation (B), with the potentialof the word lines WL1-WLn held at 0 V, an erase voltage V_(ERS) isapplied to the semiconductor substrate 1. Electron injection for varyingthe threshold is to be performed after time T4.

Besides NAND memory cells, this embodiment is applicable to any othermemory cells having a charge storage layer including discrete traps. Forexample, also in a NOR memory cell, the preset 1 can be used to controlthe charge distribution in the charge storage layer and to speed up thevariation of threshold voltage by charge injection.

Next, a second embodiment of the invention is described.

Here, a description is given of the enhancement of retentioncharacteristics in the case of injecting electrons. Specifically, inorder to enhance retention characteristics, electron injection forvarying the threshold is followed by an erase operation (E).

FIG. 11 is a process diagram showing the sequence of a method fordriving a nonvolatile semiconductor memory device according to thisembodiment.

In this embodiment, in addition to steps S101 to step S103 shown in FIG.3A, the potential of the semiconductor substrate 1 is made higher thanthat of the gate electrode 4 in step S104 in order to enhance theretention characteristics for electrons injected in step S103. Thiscorresponds to the erase operation (E).

In the following, a description is given of the enhancement of electronretention characteristics resulting from hole injection in this eraseoperation (E).

FIG. 10B shows a time chart for setting the threshold after a programoperation. The erase operation (E) on the NAND string of FIG. 8 isperformed in accordance with this time chart. Electron injection iscompleted during time T1. The threshold reached by a memory cell M1, forexample, as a consequence of the electron injection is denoted byV_(TH,1). Then the erase operation (E) is performed during the timeinterval T2-T3. Specifically, with the potential of the word linesWL1-WLn held at 0 V, an erase voltage V_(ERS) used for the eraseoperation is applied to the semiconductor substrate 1. Let ΔV_(TH,1) bethe amount of threshold variation resulting from the erase operation(E). Consequently, the threshold of the memory cell M1 becomes:

V _(TH,2) =V _(TH,1) −ΔV _(TH,1)  (4)

After time T3, charge retention continues until the next chargeinjection is performed.

In setting the voltage used for the erase operation (E), electricaldamage to the insulating film 3A needs to be taken into consideration.Preferably, electric field applied to the insulating film 3A is 20 MV/cmor less. More preferably, for rapid operation at low voltage, electricfield applied to the insulating film 3A is 15 MV/cm or less, and theapplication time is 10 seconds or less.

The charge distribution in the charge storage layer 3B after theexecution of the erase operation (E) is described with reference to FIG.2. First, if a sufficient amount of electrons are injected during timeT1, the discrete traps in the charge storage layer 3B are populated withelectrons at high density. Then, upon the execution of the eraseoperation (E), some of the discrete traps in the charge storage layer 3Bare filled with holes. Specifically, by the erase operation (E), holesare injected from the semiconductor substrate 1. At this time, the holesare captured near the interface of the charge storage layer 3B facingthe semiconductor substrate 1. By the above electron injection and thesubsequent erase operation (E), the charge distribution shown in FIG. 1Ais formed in the charge storage layer 3B. That is, the chargedistribution in the charge storage layer 3B is such that electrons arecaptured near the interface with the gate electrode 4 and holes arecaptured near the interface with the semiconductor substrate 1.

By way of example, a charge distribution immediately after thecompletion of the erase operation (E) is assumed such that, in thecharge storage layer 3B, holes exist at the interface with thesemiconductor substrate 1 at a density of N_(H) [cm⁻²], and electronsexist at the interface with the gate electrode 4 at a density of N_(E)[cm⁻²]. Then the threshold of equation (4) is expressed as:

$\begin{matrix}{V_{{TH},2} = {\frac{q}{ɛ_{0}}\left\{ {{N_{E}\left( \frac{x_{C}}{ɛ_{C}} \right)} - {N_{H}\left( {\frac{x_{B}}{ɛ_{B}} + \frac{x_{C}}{ɛ_{C}}} \right)}} \right\}}} & (5)\end{matrix}$

where N_(E) and N_(H) are defined so as to satisfy V_(TH,2)>0.Subsequently, in the process of charge retention, electrons and holesare redistributed, or recombined. The maximum of threshold variation ispresented below in the case where charges are redistributed and in thecase where electrons and holes are recombined with the chargedistribution remaining unchanged.

In the case where charges are redistributed, the threshold variation ismaximized when, in the charge storage layer 3B, electrons captured atthe interface with the gate electrode 4 migrate to the interface withthe semiconductor substrate 1 and holes captured at the interface withthe semiconductor substrate 1 migrate to the interface with the gateelectrode 4. The threshold upon completion of the redistribution isgiven by:

$\begin{matrix}{V_{{TH},3} = {\frac{q}{ɛ_{0}}\left\{ {{N_{E}\left( {\frac{x_{B}}{ɛ_{B}} + \frac{x_{C}}{ɛ_{C}}} \right)} - {N_{H}\left( \frac{x_{C}}{ɛ_{C}} \right)}} \right\}}} & (6)\end{matrix}$

The variation from the threshold immediately after charge injection(equation (5)) is given by:

$\begin{matrix}{{V_{{TH},3} - V_{{TH},2}} = {\frac{q}{ɛ_{0}}\left\{ {\left( {N_{E} + N_{H}} \right)\left( \frac{x_{B}}{ɛ_{B}} \right)} \right\}}} & (7)\end{matrix}$

As seen from equation (7), by charge redistribution, the thresholdbecomes higher than that immediately after charge injection.

In the case where electrons and holes are recombined with the chargedistribution remaining unchanged, the threshold variation is maximizedwhen, in the charge storage layer 3B, all the holes captured at theinterface with the semiconductor substrate 1 are recombined withelectrons captured at the interface with the gate electrode 4. Uponcompletion of the recombination, no holes exist in the charge storagelayer 3B, and electrons exist at a density of N_(E)−N_(H) [cm⁻²] on thegate electrode 4 of the charge storage layer 3B. At this time, thethreshold is given by:

$\begin{matrix}{V_{{TH},4} = {\frac{q}{ɛ_{0}}\left\{ {\left( {N_{E} - N_{H}} \right)\left( \frac{x_{C}}{ɛ_{C}} \right)} \right\}}} & (8)\end{matrix}$

The variation from the threshold immediately after charge injection(equation (5)) is given by:

$\begin{matrix}{{V_{{TH},4} - V_{{TH},2}} = {\frac{q}{ɛ_{0}}\left\{ {N_{H}\left( \frac{x_{B}}{ɛ_{B}} \right)} \right\}}} & (9)\end{matrix}$

As seen from equation (9), by electron-hole recombination, the thresholdbecomes higher than that immediately after charge injection.

FIG. 12 is a graph schematically showing the retention characteristicsof the threshold voltage.

In the actual process of charge retention, charges in the charge storagelayer 3B are released through the insulating film 3A or the insulatingfilm 3C to the semiconductor substrate 1 or the gate electrode 4.Release of charges results in attenuating the threshold. In particular,release of electrons is the main cause of the threshold attenuation.

In this embodiment, the erase operation (E) performed after electroninjection can facilitate charge redistribution or electron-holerecombination in the process of charge retention. The chargeredistribution or the electron-hole recombination has an effect ofpreventing the threshold attenuation due to release of charges. Ascompared with the case without the erase operation (E), the thresholddifference in the case of charge redistribution is given by equation(7), and the threshold difference in the case of electron-holerecombination is given by equation (9). These are both shown in FIG. 12.

The erase operation (E) performed after electron injection results inthe retention characteristics of the threshold as represented by theretention curve 1 of FIG. 12. The retention curve 1 represents bothcases in the process of charge retention, i.e., the case where chargesare redistributed and the case where electrons and holes are recombined.On the other hand, the retention curve 2 of FIG. 12 represents retentioncharacteristics in the case where the erase operation (E) after electroninjection is omitted. As described above, the erase operation (E)performed after electron injection enhances the retentioncharacteristics of the threshold.

When charge redistribution or electron-hole recombination occurs in thecharge storage layer 3B, the threshold variation is affected moregreatly by variation of charges located far from the gate electrode 4because the threshold variation is determined by the product of distanceand charge. Holes injected by the erase operation (E) at the interfacebetween the charge storage layer 3B and the insulating film 3A vanish byredistribution or recombination, and this effect of vanishing greatlyserves to increase the threshold. Consequently, in balance with thethreshold variation due to vanishing of negative charges, the thresholdtends to be maintained. Conventionally, only electrons are injected intothe charge storage layer 3B by the program operation, and the electronsare released during retention, attenuating the threshold. In contrast,the process of the invention corresponds to a stronger program operationfollowed by slight release of electrons.

FIG. 13 is a graph showing the data characterizing the retentioncharacteristics.

The flat band voltage is plotted on the vertical axis versus theretention time. The enhancement of retention characteristics isindicated by the stability of the flat band voltage. For the purpose ofdemonstrating the effect of the erase operation (E) on the retentioncharacteristics, the erase operation (E) was performed on a MONOS memorycell in which the insulating film 3A is a silicon oxide film having athickness of 4 nm, the charge storage layer 3B is a silicon nitride filmhaving a thickness of 5 nm, and the insulating film 3C is made of alaminated film of alumina and a silicon nitride film having a thicknessof 15 nm and 2 nm, respectively (the memory cell having this thicknessconfiguration being hereinafter referred to as “memory cell 2”). Theresult of characterizing the retention characteristics in this setup isrepresented by the mark ⋄ in FIG. 13. In forming the program levels“10”, “00”, and “01” in FIG. 13, once a program operation was performed,different erase operations (E) were performed, respectively.Specifically, the voltage value and the application time of the eraseoperation (E) for forming the program level “10” were 20 V and 2milliseconds, respectively. The voltage value and the application timeof the erase operation (E) for forming the program level “00” were 20 Vand 0.5 milliseconds, respectively. The voltage value and theapplication time of the erase operation (E) for forming the programlevel “01” were 20 V and 35 microseconds, respectively. The result ofcharacterizing the retention characteristics without the erase operation(E) is represented by the mark Δ. As seen from FIG. 13, retention withthe erase operation (E) being performed has higher retentioncharacteristics than retention with the erase operation (E) beingomitted.

It is noted that the voltage pulse used for the erase operation (E) maybe a combination of a plurality of voltage pulses. The combination needsto satisfy the following requirements: all the applied voltages need tohave the same polarity, and the threshold needs to reach an intendedthreshold after application of the pulses.

Next, a third embodiment of the invention is described.

Here, a description is given of the enhancement of retentioncharacteristics in the case of injecting holes. The description can bemade on the analogy of the second embodiment for enhancing retentioncharacteristics in the case of injecting electrons. In order to enhanceretention characteristics, hole injection intended for retention isfollowed by a program operation (F).

FIG. 14 is a process diagram showing the sequence of a method fordriving a nonvolatile semiconductor memory device according to thisembodiment.

In this embodiment, in addition to steps S106 to step S108 shown in FIG.3B, the potential of the gate electrode 4 is made higher than that ofthe semiconductor substrate 1 in step S109 in order to enhance theretention characteristics for holes injected in step S108. Thiscorresponds to the program operation (F).

In the following, a description is given of the enhancement of holeretention characteristics resulting from electron injection in thisprogram operation (F).

FIG. 10C shows a time chart for setting the threshold after an eraseoperation. The program operation (F) on the NAND string of FIG. 8 isperformed in accordance with this time chart. Hole injection isperformed during the time interval T2-T3. For example, holes areinjected into the memory cells M1-Mn by collective erase operation onthe NAND string. Specifically, with the potential of the word linesWL1-WLn held at 0 V, an erase voltage V_(ERS) is applied to thesemiconductor substrate 1. Let V_(TH,5) be the threshold reached by thehole injection. Then the program operation (F) is collectively performedduring the time interval T3-T4. Specifically, with the potential of thebit line BL2 held at 0 V, a voltage of approximately 5 V is applied tothe select gate SG2 to turn the transistor S2 into the conducting state.Furthermore, a voltage V_(PGM) used for the program operation (F) isapplied to the word lines WL1-WLn. Let ΔV_(TH,5) be the amount ofthreshold variation resulting from the program operation (F).Consequently, the threshold of the memory cells M1-Mn becomes:

V _(TH,6) =V _(TH,5) +ΔV _(TH,5)  (10)

After time T4, charge retention continues until the next chargeinjection is performed.

In FIG. 2, the charge distribution in the charge storage layer 3Bimmediately after the execution of the program operation (F) followinghole injection is such that electrons are captured near the interfacewith the semiconductor substrate 1 and holes are captured near theinterface with the gate electrode 4. In the subsequent process of chargeretention, the injected holes are released from the charge storage layer3B, attenuating the threshold. On the other hand, charge redistributionor electron-hole recombination occurs. How the charge redistribution orelectron-hole recombination occurs can be described on the analogy ofthe charge redistribution or recombination in the second embodiment withthe polarity of electrons and holes being reversed.

In setting the voltage used for the program operation (F), electricaldamage to the insulating film 3A needs to be taken into consideration.Preferably, electric field applied to the insulating film 3A is 20 MV/cmor less. More preferably, for rapid operation at low voltage, electricfield applied to the insulating film 3A is 15 MV/cm or less, and theapplication time is 10 seconds or less. By way of example, for thepurpose of demonstrating the effect of the program operation (F) on theretention characteristics, the program operation (F) was performed onthe memory cell 2. The result of characterizing the retentioncharacteristics in this setup is represented by the mark ⋄ in FIG. 13.In forming the program level “11” in FIG. 13, once an erase operationwas performed, the program operation (F) was performed. Specifically,the voltage value and the application time of the program operation (F)for forming the program level “11” were 20 V and 10 nanoseconds,respectively. The result of characterizing the retention characteristicswithout the program operation (F) is represented by the mark Δ. As seenfrom FIG. 13, retention with the program operation (F) being performedhas higher retention characteristics than retention with the programoperation (F) being omitted.

It is noted that the voltage pulse used for the program operation (F)may be a combination of a plurality of voltage pulses. The combinationneeds to satisfy the following requirements: all the applied voltagesneed to have the same polarity, and the threshold needs to reach anintended threshold after application of the pulses.

Next, a nonvolatile semiconductor memory device according to theembodiment of the invention is described.

More specifically, the nonvolatile memory cell of the inventiondescribed with reference to FIGS. 1 to 14 can be incorporated into aperipheral circuit and installed in a nonvolatile semiconductor memorydevice.

FIG. 15 is a schematic view illustrating a schematic configuration ofsuch a nonvolatile semiconductor memory device.

The nonvolatile semiconductor memory device shown includes a memory cellarray 11 and a peripheral circuit 10. Each memory cell in the memorycell array 11 is a transistor type memory cell having a laminatedinsulating film including a charge storage layer. The peripheral circuit10 is composed of a voltage generation circuit 13 for generating aprogram voltage, an erase voltage, or a read voltage, a voltage controlcircuit 12 for coupling the voltage generated in the voltage generationcircuit 13 to the memory cell array 11, and a read circuit 14 forreading information programmed in the memory cell array 11. The voltagerequired for implementing the preset 1, the preset 2, the eraseoperation (E), or the program operation (F) described in the first tothird embodiment is supplied from the voltage generation circuit. Theapplication time required for each operation is controlled by thevoltage control circuit 12.

The embodiments of the invention have been described with reference toexamples. However, the invention is not limited to the above examples.For instance, the examples can be combined with each other as long astechnically feasible, and such combinations are also encompassed withinthe scope of the invention. Specifically, the program or erase operationdescribed above with reference to the first embodiment can be followedby the retention described above with reference to the second or thirdembodiment.

The first to third embodiment can be applied to any memory cellscomprising a laminated insulating film including a charge storage layer.Furthermore, the material of the semiconductor substrate 1 is notlimited to a silicon substrate, but may be a polysilicon substrate, aSiGe substrate, a Ge substrate, or a SiGeC substrate. The configurationof the semiconductor substrate 1 is not limited to a P-type well or aP-type semiconductor layer (SOI), but may be SGOI (silicon germanium oninsulator) or GOI (germanium on insulator).

The memory cell may be configured as a vertical transistor or a FINtransistor. Alternatively, the memory cell array itself may have avertically laminated structure.

The invention is applicable to various memory cell arrays as long as ithas memory cells comprising a laminated insulating film including acharge storage layer. Such memory cell arrays include not only of theNAND type and the NOR type, but also of the AND type (H. Kume, M. Kato,T. Adachi, T. Tanaka, T. Sasaki, T. Okazaki, N. Miyamoto, S. Saeki, Y.Ohji, M. Ushiyama, 3. Yagami, T. Morimoto, and T. Nishida, “A 1.28 μm²contactless memory cell technology for a 3V-only 64 Mbit EEPROM”, IEDMTech. Dig., pp. 991-993, December (1992)), the DINOR type (H. Onoda, Y.Kunori, S. Kobayashi, M. Ohi, A. Fukumoto, N. Ajika, and H. Miyoshi, “Anovel cell structure suitable for a 3 volt operation, sector erase flashmemory”, IEDM Tech. Dig., pp. 599-602, December (1992)), the split gatetype (G. Samachisa, C. Su, Y. Kao, G. Smarandoiu, T. Wong, and C. Hu, “A128K flash EEPROM using double polysilicon technology”, ISSCC Dig. Tech.Papers, pp. 76-77, February (1987)), the stack type (V. N. Kynett, A.Baker, M. Fandrich, G. Hoekstra, O. Jungroth, J. Kreifels, and S. Wells,“An in-system reprogrammable 256K CMOS flash memory”, ISSCC Dig. Tech.Papers, pp. 132-133, February (1988)), the triple layer polysilicon type(F. Masuoka, M. Asano, H. Iwashita, T. Komuro, and S. Tanaka, “A newflash EEPROM cell using triple polysilicon technology”, IEDM Tech. Dig.,pp. 464-467, December (1984)), and the 3Tr-NAND (JP-A2007-115407(Kokai)).

1. (canceled)
 2. A method for driving a nonvolatile semiconductor memorydevice including a plurality of NAND strings, each of the NAND stringsincluding a plurality of memory cells, each of the memory cellsincluding source/drain diffusion layers spaced from each other in asurface portion of a semiconductor substrate, a laminated insulatingfilm formed on a channel between the source/drain diffusion layers andincluding a charge storage layer, and a gate electrode formed on thelaminated insulating film, the gate electrodes of the memory cells ofneighboring NAND strings being connected by a word line, the nonvolatilesemiconductor memory device having a first data memory state and asecond memory state different from the first memory state, the methodcomprising: performing a first operation to change to the first datamemory state from the second data memory state by injecting holes intothe charge storage layer, the performing the first operation including:providing a first potential difference between the semiconductorsubstrate and the gate electrode so that the semiconductor substrate hasa higher potential than the gate electrode; after the providing thefirst potential difference, providing a second potential differencebetween the semiconductor substrate and the gate electrode so that thesemiconductor substrate has a lower potential than the gate electrode;and after the providing the second potential difference, providing apotential difference between the semiconductor substrate and the gateelectrode so that the gate electrode has a lower potential than thesemiconductor to inject holes into the charge storage layer to change tothe first data memory state from the second data memory state.
 3. Themethod according to claim 2, wherein the first potential difference is25 volts or less, and application time of the third potential differenceis 30 seconds or less, and the second potential difference is 25 voltsor less, and application time of the fourth potential difference is 30seconds or less.
 4. The method according to claim 2, wherein thelaminated insulating film includes a first insulating film provided onthe semiconductor substrate side, a second insulating film provided onthe gate electrode side, and the charge storage layer provided betweenthe first insulating film and the second insulating film.
 5. Anonvolatile semiconductor memory device comprising: a plurality of NANDstrings, each of the NAND strings including a plurality of memory cells,each of the memory cells including source/drain diffusion layers spacedfrom each other in a surface portion of a semiconductor substrate, alaminated insulating film formed on a channel between the source/draindiffusion layers and including a charge storage layer, and a gateelectrode formed on the laminated insulating film, the gate electrodesof the memory cells of neighboring NAND strings being connected by aword line, the nonvolatile semiconductor memory device having a firstdata memory state and a second memory state different from the firstmemory state; and a control circuit configured to perform a firstoperation to change to the first data memory state from the second datamemory state by injecting holes into the charge storage layer, the firstoperation including: providing a first potential difference between thesemiconductor substrate and the gate electrode so that the semiconductorsubstrate has a higher potential than the gate electrode; after theproviding the first potential difference, providing a second potentialdifference between the semiconductor substrate and the gate electrode sothat the semiconductor substrate has a lower potential than the gateelectrode; and after the providing the second potential difference,providing a potential difference between the semiconductor substrate andthe gate electrode so that the gate electrode has a lower potential thanthe semiconductor to inject holes into the charge storage layer tochange to the first data memory state from the second data memory state.6. The device according to claim 5 wherein the first potentialdifference is 25 volts or less, and application time of the thirdpotential difference is 30 seconds or less, and the second potentialdifference is 25 volts or less, and application time of the fourthpotential difference is 30 seconds or less.
 7. The device according toclaim 5, wherein the laminated insulating film includes a firstinsulating film provided on the semiconductor substrate side, a secondinsulating film provided on the gate electrode side, and the chargestorage layer provided between the first insulating film and the secondinsulating film.